Array substrate for liquid crystal display device and method of fabricating the same

ABSTRACT

An array substrate for an LCD device includes a first TFT including a first semiconductor layer, a first gate electrode, wherein the first gate electrode is directly over the first semiconductor layer; a first protrusion extending from the first gate electrode along an edge of the first semiconductor layer; a second TFT including a second semiconductor layer, a second gate electrode, wherein the second gate electrode is directly over the second semiconductor layer; a second protrusion extending from the second gate electrode along an edge of the second semiconductor layer; a third TFT connected to crossed data and gate lines including a third semiconductor layer, a third gate electrode, wherein the third gate electrode is directly over the third semiconductor layer; a third protrusion extending from the third gate electrode along an edge of the third semiconductor layer; and a pixel electrode.

This application claims the benefit of Korean Patent Application No.10-2005-0092286, filed in Korea on Sep. 30, 2005, which is herebyincorporated by reference for all purposes as if fully set forth herein.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a liquid crystal display device. Moreparticularly, the present invention relates to an array substrate forthe liquid crystal display device having an integrated driving circuitand a method of fabricating the same.

2. Discussion of the Related Art

In general, a liquid crystal display (LCD) device uses the opticalanisotropy and the polarization properties of liquid crystal moleculesto display images. The LCD device includes first and second substratefacing each other and a liquid crystal layer interposed therebetween.The first substrate, referred to as an array substrate, includes a thinfilm transistor (TFT) that is used as a switching element. The secondsubstrate, referred to as a color filter substrate, includes a colorfilter. The TFT includes a semiconductor layer made of amorphous siliconor polycrystalline silicon. Because a process using amorphous silicon isperformed at a relatively low temperature and requires a relativelycheap insulating substrate, amorphous silicon has been widely used inTFTs. However, because the amorphous silicon has randomly arrangedsilicon atoms, a weak bonding strength between silicon atoms, danglingbonds and low field effect mobility occur in amorphous silicon.Accordingly, the TFT of the amorphous silicon is not adequate for adriving circuit (DC).

In contrast, because the polycrystalline silicon has an excellent fieldeffect mobility, polycrystalline silicon is used for the TFT of thedriving integrated circuit. Also, when the DC is formed on a substrateusing polycrystalline silicon without using a tape automated bonding(TAB), an LCD device may become compact and the production cost of theLCD device may decrease.

FIG. 1 is a schematic plan view showing an array substrate for an LCDdevice according to the related art. As shown in FIG. 1, the firstsubstrate 30 includes a display region D1 and a non-display region D2. Apixel region P, a TFT T on the pixel region P and a pixel electrode 17connected to the TFT are formed in the display region D1. In addition, agate line 12 along a first direction of the pixel region P and a dataline 14 are formed to define the pixel region P. A gate DC 16 and a dataDC 18 are formed on the non-display region D2 of the first substrate 30.The gate DC 16 and the data DC 18 supply a control signal and a datasignal to the pixel region P through the gate line 12 and the data line14, respectively. The gate DC 16 and the data DC 18 each has a TFT witha complementary metal-oxide semiconductor (CMOS) structure to output asuitable signal applied to the pixel region P. The TFT with the CMOSstructure is used for rapidly treating signals in the driving integratedcircuit. The CMOS structure includes n-type and p-type semiconductors.

FIG. 2 is a schematic plan view showing a display region of an LCDdevice having an integrated driving circuit on a first substrateaccording to the related art. As shown in FIG. 2, the display region ofthe first substrate 30 includes the gate line GL, the data line DL, theTFT T, the pixel electrode 70 and a storage capacitor Cst. The gate lineGL and the data line DL cross each other to define the pixel region P,and the TFT T is formed at a crossing portion of the gate and data linesGL and DL. The pixel electrode 70 and the storage capacitor Cst areformed in the pixel region P. Because cross-talk is generated betweenthe pixel electrode 70 and the gate line GL or the data line DL when thepixel electrode 70 overlaps the gate and data lines GL and DL, thequality of displayed images deteriorates. Thus, the pixel electrode 70is spaced apart from the gate and data lines GL and DL. A black matrix82 covers regions between the pixel electrode 70 and the gate and datalines GL and DL. The black matrix 82 also covers regions correspondingto the TFT T and the storage capacitor Cst.

FIG. 3A is a cross-sectional view showing a display region taken alongthe line III-III of FIG. 2 and FIG. 3B is a cross-sectional view showinga non-display region. A liquid crystal panel LP is shown. The firstsubstrate 30 includes the TFT T, gate line GL, data line DL, and thepixel electrode 70. The TFT T may include a semiconductor layer 38, agate electrode 52, a source electrode 72 a and a drain electrode 72 b.The TFT T may be formed by a process. First, a buffer layer 32 is formedon the first substrate 30. Then, the semiconductor layer 38 is formed onthe buffer layer 32 by depositing, patterning and crystallizingamorphous silicon. A gate insulating layer 46 is deposited on thesemiconductor layer 38. The gate electrode 52 and 54 are formed bydepositing and patterning a conductive metal. Then, an interlayerinsulating layer 60, the source and drain electrode 72 a and 72 b and apassivation layer 76 are sequentially formed. The pixel electrode 70 isformed on the passivation layer 76 to be connected to the drainelectrode 72 b through a drain contact hole of the passivation layer 76.

The second substrate 80 includes the black matrix 82, a color filterlayer 84 and a common electrode 86. A liquid crystal layer LC isinterposed between the first substrate 30 and the second substrate 80.The color filter layer 84 includes red, green and blue sub-color filterscorresponding to the pixel region P. The common electrode 86 is formedon the color filter 84. The black matrix 82 is formed corresponding tothe non-display region D2, the TFT T and the storage capacitor Cst.Also, the black matrix 82 covers the regions between the pixel electrode70 and the gate line GL and the data line DL to block light passingthrough the regions. When the black matrix 82 is formed, a margin α thatcompensates for misalignment of the first substrate 30 and the secondsubstrate 80 should be considered. Without the margin α, or a margin αand L, the quality of displayed images is deteriorated due to lightleakage resulting from the misalignment of the first substrate 30 andthe second substrate 80. Unfortunately, the margin causes the apertureratio of the LCD device to decrease.

As shown in FIG. 3A, the DC is formed on the non-display region D2. TheDC may include a CMOS structure including the n-type TFT T(n) ofpolycrystalline silicon and the p-type TFT T(p) of polycrystallinesilicon. The TFT may be an n-type or a p-type TFT. The DC includes theTFTs T(n) and T(p) made of polycrystalline silicon having a CMOSstructure. The TFTs T(n) and T(p) include the gate electrodes 48 and 50,the source electrodes 68 a and 70 a and the drain electrodes 68 b and 70b. Because the gate insulating layer is formed as a thin layer on thesemiconductor layer, the gate insulating layer has a step difference.Due to the step difference, the gate electrode can be disconnected in acrossing portion of the gate electrode and the semiconductor layer.

FIGS. 4A and 4B are enlarged perspective views showing the portion “F”of FIG. 2. As shown in FIGS. 4A and 4B, in the TFT T, the semiconductorlayer 38 is formed on the first substrate 30 by depositing, patterningand crystallizing amorphous silicon. The semiconductor layer 38 isconnected to the source and drain electrode 68 a and 68 b through firstand second contact holes 66 a and 66 b. The gate insulating layer 46 isformed on the semiconductor layer 38, and then the gate electrode isformed on the gate insulating layer 46 by depositing and patterningconductive metal. The step difference of the gate insulating layer 38affects the gate electrode 52. When the gate electrode 52 is formedusing an etchant, the etchant pools into a crossing region G of the gateelectrode 52 and the semiconductor layer 38 having the step difference.Accordingly, the gate electrode 52 is over etched to an extent that thegate electrode 52 becomes disconnected. Also, the process of fabricatingthe array substrate has many process steps. Thus, the process isdisadvantageous.

FIGS. 5A to 5I and FIGS. 6A to 6I are cross-sectional views showing aprocess of fabricating a driving circuit and a pixel region in a displayregion according to the related art, respectively.

FIGS. 5A and 6A show a first mask process. As shown in FIGS. 5A and 6A,the display region D1 and the non-display region D2 are defined on thefirst substrate and the pixel region P is defined on the display regionD1. In addition, first and second regions A1 and A2 are defined on thenon-display region D2 and a switching region A3 and a storage region A4are defined on the pixel region P.

First, the buffer layer 32 is formed on the first substrate 30 bydepositing an insulating material. Then, first, second, third and fourthsemiconductor layers 34, 36, 38 and 40 made of polycrystalline siliconmay be formed on the buffer layer 32 in the first and second regions A1and A2, the switching region A3 and the storage region A4 by depositing,patterning and crystallizing amorphous silicon. The first, second, thirdand fourth semiconductor layers 34, 36, 38 and 40 are patterned using afirst patterning mask. The amorphous silicon may be crystallized using alaser. The first, second and third semiconductor layers 34, 36 and 38function as an active layer. The fourth semiconductor layer 40 is acapacitor electrode, so the fourth semiconductor layer 40 is defined asa first storage electrode.

FIGS. 5B and 6B show a second mask process. As shown in FIGS. 5B and 6B,a photoresist is coated on entire surface of the first substrate 30including the semiconductor layers 34, 36, 38 and 40. Then, aphotoresist pattern 42 is formed to cover the first and second regionsA1 and A2 and the switching region using a second patterning mask. Thephotoresist pattern 42 exposes the fourth semiconductor layer 40 in thestorage region A4. Next, n-type or p-type ions are doped into the fourthsemiconductor layer 40 using the photoresist pattern 42 as a dopingmask. Because the fourth semiconductor layer 40 functions as a capacitorelectrode 40, the n+ type impurities or p-type impurities are doped intothe fourth semiconductor layer 40. The photoresist pattern 42 is removedfrom the first substrate 30.

FIGS. 5C and 6C show a third mask process. As shown in FIGS. 5C and 6C,a gate insulating layer 46 is formed on the entire surface of the firstsubstrate 30 including the semiconductor layers 34, 36, 38 and 40 bydepositing an inorganic insulating material. The inorganic insulatingmaterial may include silicon nitride and/or silicon oxide. Because thegate insulating layer 46 is formed on the semiconductor layers 34, 36,38 and 40, the gate insulating layer 46 has a step difference. Next,first, second and third gate electrodes 48, 50 and 52 and a secondstorage electrode 54 are formed corresponding to the first, second,third and fourth gate electrodes 34, 36, 38 and 40, respectively, on thegate insulating layer 46 by depositing a conductive metal layer andpatterning the conductive metal using a third patterning mask. Thefirst, second and third gate electrodes 48, 50 and 52 have smaller sizesthan the first, second and third semiconductor layers 34, 36 and 38, andthe fourth gate electrode 54 has substantially the same size as thefourth semiconductor layer 40. Simultaneously, the gate line GL isformed in the switching region A3. The gate electrodes 48, 50 and 52 andthe second storage electrode 54 are formed by wet etching the conductivemetal layer using an etchant. Because the gate insulating layer 46having the step difference affects the gate electrodes 48, 50 and 52 andthe second storage electrode 54, the etchant pools into the crossingportion of the gate electrodes 48, 50 and 52 and the second storageelectrode 54 and the semiconductor layers 34, 36, 38 and 40.Accordingly, the gate electrodes 48, 50 and 52 and the second storageelectrode 54 are over etched to the extent that the gate electrodes 48,50 and 52 and the second storage electrode 54 become disconnected.

FIGS. 5D and 6D show a process doping n+ type impurities into thesemiconductor layer in the second region A2 and the switching region A3using a fourth mask. As shown in FIGS. 5D and 6D, the photoresist iscoated on the entire surface of the first substrate 30 and patternedusing a fourth patterning mask to form the photoresist pattern 56 overthe first region A1. The photoresist pattern 56 exposes the second,switching and storage regions A2, A3 and A4. Next, the n+ typeimpurities are doped into the second, switching and storage regions A2,A3 and A4. Consequently, the n+ type impurities are doped into both endsof the second and third semiconductor layers 36 and 38 using the secondgate electrode 50 and the third gate electrode 52 as doping masks. Thus,both ends of the second and the third semiconductor layers 36 and 38have ohmic contact characteristics. Both ends of the second and thethird semiconductor layers 36 and 38 are thus defined as ohmic contactregions. The photoresist pattern 56 is then removed from the firstsubstrate 30.

FIGS. 5E and 6E show a process doping p+ type impurities into the firstregion using a fifth mask. As shown in FIGS. 5E and 6E, a photoresistpattern 58 is formed on the first substrate 30 including the first,second and third gate electrode 48, 50 and 52 and the second storageelectrode 54 by coating the photoresist layer and patterning thephotoresist layer using the fifth patterning mask. The photoresistpattern 58 exposes the first region A1. Next, the p+ type impurities aredoped into the first region A1 using the first gate electrode 78 as adoping mask. Consequently, the p+ type impurities are doped into bothends of the first semiconductor layer 34. Thus, both ends of the firstsemiconductor layer 34 have ohmic contact characteristics, as mentionedabove. Both ends of the first semiconductor layer 34 are thus defined asohmic contact regions.

FIGS. 5F and 6F show a sixth mask process. As shown in FIGS. 5F and 6F,an interlayer insulating layer 60 is formed on the entire surface of thefirst substrate 30 by depositing an inorganic insulating material suchas silicon nitride and silicon oxide. Then, first contact holes 62 a, 64a and 66 a and second contact holes 62 b, 64 b and 66 b are formedthrough the interlayer insulating layer 60 and the gate insulating layer46 using a sixth patterning mask. The first contact holes 62 a, 64 a and66 a and second contact holes 62 b, 64 b and 66 b expose the ohmiccontact regions of the first, second and third semiconductor layer 34,36 and 38.

FIGS. 5G and 6G show a seventh mask process. As shown in FIGS. 5G and6G, source electrodes 68 a, 70 a and 72 a and drain electrodes 68 b, 70b and 72 b are formed on the first substrate 30 by depositing aconductive metal layer and patterning the conductive metal layer using aseventh patterning mask. The source electrodes 68 a, 70 a and 72 a areformed corresponding to the first, second and third semiconductor layers34, 36 and 38, respectively, and contact respective ohmic contactregions of the first, second and third semiconductor layers 34, 36 and38. Also, the drain electrodes 68 b, 70 b, 72 b are formed correspondingto the first, second and third semiconductor layers 34, 36 and 38,respectively, and contact other ohmic contact regions of the first,second and third semiconductor layers 34, 36 and 38. The conductivemetal may include chrome, molybdenum, tungsten, copper, aluminum alloy,etc. Simultaneously, a data line DL is formed on the display region D1.The data line DL is connected to the source electrodes 68 a, 70 a and 72a and crosses the gate line GL to define the pixel region P.

In the first through seventh mask processes, the CMOS structureincluding the n-type and p-type TFTs is formed in the non-display regionD2. The n-type TFT is formed on the switching region A3 in the displayregion D1, and the storage capacitor Cst including the first and secondstorage electrode 40 and 54 is formed on the storage region A4(Cst) inthe display region D1.

FIGS. 5H and 6H show an eighth mask process. As shown in FIGS. 5H and6H, a passivation layer 76 is formed on the entire surface of the firstsubstrate 30 by depositing an insulating material such as siliconnitride and silicon oxide. Then, a drain contact hole 78 is formedthrough the passivation layer 76 to expose the drain electrode 72 b inthe switching region A3 by patterning the passivation layer 76 using aneighth patterning mask.

FIGS. 5I and 6I show a ninth mask process. A pixel electrode 70 isformed on the passivation layer 76 by depositing and patterning atransparent conductive metal using a ninth patterning mask. The pixelelectrode 76 is formed on the pixel region P and contacts the drainelectrode 72 b through the drain contact hole 78. The transparentconductive metal may include indium-tin-oxide (ITO) or indium-zinc-oxide(IZO).

Through the above-mentioned processes, the array substrate according tothe related art is formed.

Also, a color filter substrate may be formed through first to fourthmask processes. In the first mask process, the black matrix is formed onthe second substrate. In the second, third and fourth mask process, thesub-color filters having red, green and blue colors, respectively, areformed corresponding to each pixel region. Then, the array substrate andthe color filter substrate are attached to manufacture the LCD device.

As mentioned above, the LCD device according to the related art hasseveral problems. For example, the gate electrode is disconnected at thecrossing portion of the semiconductor layer and the gate electrode.Also, because the black matrix is lacking an appropriate margin, the LCDdevice has a low aperture ratio.

SUMMARY OF THE INVENTION

Accordingly, the present invention is directed to an array substrate fora liquid crystal display (LCD) device and a method of fabricating thesame that substantially obviate one or more of the problems due tolimitations and disadvantages of the related art.

An advantage of the present invention is to provide an array substratefor an LCD device that prevents a gate electrode from being disconnectedby forming protrusion at a crossing portion of the gate electrode and asemiconductor layer.

Another advantage of the present invention is to provide an arraysubstrate for an LCD device that has an improved aperture ratio byforming a black matrix on an array substrate.

Additional features and advantages of the invention will be set forth inthe description which follows, and in part will be apparent from thedescription, or may be learned by practice of the invention. These andother advantages of the invention will be realized and attained by thestructure and method particularly pointed out in the written descriptionand claims hereof as well as the appended drawings.

To achieve these and other advantages and in accordance with the purposeof the present invention, as embodied and broadly described, an arraysubstrate for an LCD device includes a substrate including a displayregion and a non-display region at a periphery of the display region; afirst TFT in the non-display region, the first TFT including a firstsemiconductor layer, a first gate electrode over the first semiconductorlayer, a first source electrode and a first drain electrode, wherein thefirst gate electrode is directly over the first semiconductor layer; afirst protrusion extending from the first gate electrode along an edgeof the first semiconductor layer; a second TFT in the non-displayregion, the second TFT including a second semiconductor layer, a secondgate electrode over the second semiconductor layer, a second sourceelectrode and a second drain electrode, wherein the second gateelectrode is directly over the second semiconductor layer; a secondprotrusion extending from the second gate electrode along an edge of thesecond semiconductor layer; a gate line and a data line crossing eachother in the display region to define a pixel region; a third TFTconnected to the data line and the gate line in the display region, thethird TFT including a third semiconductor layer, a third gate electrodeover the third semiconductor layer, a third source electrode and a thirddrain electrode, wherein the third gate electrode is directly over thethird semiconductor layer; a third protrusion extending from the thirdgate electrode along an edge of the third semiconductor layer; and apixel electrode connected to the third drain electrode in the pixelregion.

In another aspect of the present invention, a method of fabricating anarray substrate for an LCD device includes forming first, second andthird semiconductor layers on a substrate having a non-display regionand a display region, the first and second semiconductor layers beingformed in the non-display region, the third semiconductor layer beingformed in the display region; forming a gate insulating layer on thefirst, second and third semiconductor layers; forming first, second andthird gate electrodes and a gate line on the gate insulating layer, thefirst gate electrode directly over the first semiconductor layer, thesecond gate electrode directly over the second semiconductor layer, thethird gate electrode directly over the third semiconductor layer, thegate line in the display region; forming a first protrusion extendingfrom the first gate electrode along an edge of the first semiconductorlayer, a second protrusion extending from the second gate electrodealong an edge of the second semiconductor layer, a third protrusionextending from the third gate electrode along an edge of the thirdsemiconductor layer; forming an interlayer insulating layer on thefirst, second and third gate electrode, the first, second and thirdprotrusions and the gate line, the interlayer insulating layer havingfirst and second contact holes exposing the first semiconductor layer,third and fourth contact holes exposing the second semiconductor layer,and fifth and sixth contact holes exposing the third semiconductorlayer, respectively; forming first, second and third source electrodes,first, second and third drain electrodes and a data line on theinterlayer insulating layer, wherein the first source electrode and thefirst drain electrode are connected to the first semiconductor layerthrough the first and second contact holes, and the second sourceelectrode and the second drain electrode are connected to the secondsemiconductor layer through the third and fourth contact holes, and thethird source electrode and the third drain electrode are connected tothe third semiconductor layer through the fifth and sixth contact holes,respectively, and the data line crosses the gate line to define a pixelregion in the display region; forming a passivation layer on the first,second and third source electrodes, the first, second and third drainelectrodes and the data line, the passivation layer having a draincontact hole exposing the third drain electrode; and forming a pixelelectrode on the passivation layer in the pixel region, the pixelelectrode connected to the third drain electrode through the draincontact hole.

In another aspect of the present invention, a method of fabricating anarray substrate for an LCD device includes forming first, second, thirdand fourth semiconductor layers on a substrate having non-display anddisplay regions, the first and second semiconductor layers being formedin the non-display region, the third and fourth semiconductor layersbeing formed in the display region, the first semiconductor layer havingan active region and an ohmic contact region at both sides of the activeregion, the second and third semiconductor layers having an activeregion, an ohmic contact region and an LDD region, wherein the LDDregion is disposed at both sides of the active region, and the ohmiccontact region is disposed at outer sides of the LDD region; doping theohmic contact region of the second and third semiconductor layers andthe fourth semiconductor layer with high concentration n-type impuritiesusing a first photoresist pattern as a doping mask; forming a gateinsulating layer on the first, second, third and fourth semiconductorlayers; forming a first gate electrode corresponding to the activeregion of the first semiconductor layer on the gate insulating layer, asecond gate electrode corresponding to the active region of the secondsemiconductor layer on the gate insulating layer, a third gate electrodecorresponding to the active region of the third semiconductor layer onthe gate insulating layer, a fourth gate electrode corresponding to thefourth semiconductor layer on the gate insulating layer and a gate linein the display region; doping the ohmic contact region of the firstsemiconductor layer with high concentration p-type impurities using asecond photoresist pattern and the first gate electrode as a dopingmask; doping the LDD region of the second and third semiconductor layerswith low concentration n-type impurities using the first, second, thirdand fourth gate electrodes as a doping mask; forming an interlayerinsulating layer on the first, second, third and fourth gate electrodesand the gate line, wherein the interlayer insulating layer has first andsecond contact holes exposing the first semiconductor layer, third andfourth contact holes exposing the second semiconductor layer, and fifthand sixth contact holes exposing the third semiconductor layer,respectively; forming first, second and third source electrodes, first,second and third drain electrodes and a data line on the interlayerinsulating layer, wherein the first source electrode and the first drainelectrode are connected to the first semiconductor layer through thefirst and second contact holes, and the second source electrode and thesecond drain electrode are connected to the second semiconductor layerthrough the third and fourth contact holes, and the third sourceelectrode and the third drain electrode are connected to the thirdsemiconductor layer through the fifth and sixth contact holes,respectively, and the data line crosses the gate line to define a pixelregion in the display region; forming a passivation layer on the first,second and third source electrodes, the first, second and third drainelectrodes and the data line, the passivation layer having a draincontact hole exposing the third drain electrode; and forming a pixelelectrode on the passivation layer in the pixel region, the pixelelectrode connected to the third drain electrode through the draincontact hole.

In another aspect of the present invention, a TFT for an LCD deviceincludes a semiconductor layer; a gate insulating layer on thesemiconductor layer; a gate electrode directly over the semiconductorlayer on the gate insulating layer; a protrusion extending from the gateelectrode along an edge of the semiconductor layer; an interlayerinsulating layer on the gate electrode, the interlayer insulating layerhaving first and second contact holes exposing the semiconductor layer;and a source electrode and a drain electrode spaced apart from thesource electrode on the interlayer insulating layer, the source anddrain electrodes connected to the semiconductor layer through the firstand second contact holes, respectively.

In another aspect of the present invention, a method of fabricating aTFT for an LCD includes forming a semiconductor layer; forming a gateinsulating layer on the semiconductor layer; forming a gate electrodedirectly over the semiconductor layer on the insulating layer; forming aprotrusion extending from the gate electrode along an edge of thesemiconductor layer on the gate insulating layer; forming an interlayerinsulating layer having first and second contact holes exposing thesemiconductor layer on the gate electrode and the protrusion; andforming a source electrode and a drain electrode spaced apart form thesource electrode on the interlayer insulating layer, the source anddrain electrodes connected to the semiconductor layer through the firstand second contact holes, respectively.

In another aspect of the present invention, an LCD device includes afirst substrate having a display region and a non-display region at aperiphery of the display region; a first TFT in the non-display region,the first TFT including a first semiconductor layer, a first gateelectrode over the first semiconductor layer, a first source electrodeand a first drain electrode, wherein the first gate electrode isdirectly over the first semiconductor layer; a first protrusionextending from the first gate electrode along an edge of the firstsemiconductor layer; a second TFT in the non-display region, the secondTFT including a second semiconductor layer, a second gate electrode overthe second semiconductor layer, a second source electrode and a seconddrain electrode, wherein the second gate electrode is directly over thesecond semiconductor layer; a second protrusion extending from thesecond gate electrode along an edge of the second semiconductor layer; agate line and a data line crossing each other in the display region todefine a pixel region; a third TFT connected to the data and gate linesin the display region, the third TFT including a third semiconductorlayer, a third gate electrode over the third semiconductor layer, athird source electrode and a third drain electrode, wherein the thirdgate electrode is directly over the third semiconductor layer; a thirdprotrusion extending from the third gate electrodes along an edge of thethird semiconductor layer; a pixel electrode connected to the thirddrain electrode in the pixel region; a second substrate facing the firstsubstrate; a color filter on the second substrate; a common electrode onthe color filter; and a liquid crystal layer interposed between thepixel electrode and the common electrode.

It is to be understood that both the foregoing general description andthe following detailed description are exemplary and explanatory and areintended to provide further explanation of the invention as claimed.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the invention and are incorporated in and constitute aportion of this specification, illustrate embodiments of the inventionand together with the description serve to explain the principles of theinvention. In the drawings:

FIG. 1 is a schematic plan view of a liquid crystal panel according tothe related art;

FIG. 2 is a plan view of an array substrate for an LCD device accordingto the related art;

FIGS. 3A and 3B are cross-sectional views of a non-display region and adisplay region of an array substrate for an LCD device according to therelated art;

FIGS. 4A and 4B are enlarged plan and perspective views of a portion “F”of the FIG. 2;

FIGS. 5A, 5B, 5C, 5D, 5E, 5F, 5G, 5H and 5I are cross-sectional viewsshowing a process of fabricating an array substrate for an LCD deviceaccording to the related art;

FIGS. 6A, 6B, 6C, 6D, 6E, 6F, 6G, 6H and 6I are cross-sectional viewsshowing a process of fabricating an array substrate for an LCD deviceaccording to the related art;

FIG. 7 is an enlarged plan view of an array substrate for an LCD deviceaccording to the present invention;

FIGS. 8A and 8B are enlarged plan and perspective views of a portion “J”of the FIG. 7;

FIGS. 9A and 9B are schematic cross-sectional view of an LCD devicehaving an integrated driving circuit according to the present invention;

FIGS. 10A, 10B, 10C, 10D, 10E, 10F, 10G, 10H, 10I and 10J arecross-sectional views showing a process of fabricating an arraysubstrate for an LCD device having an integrated driving circuitaccording to the present invention; and

FIGS. 11A, 11B, 11C, 11D, 11E, 11F, 11G, 11H, 11I and 11J arecross-sectional views showing a process of fabricating an arraysubstrate for an LCD device having an integrated driving circuitaccording to the present invention.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS

Reference will now be made in detail to exemplary embodiments of thepresent invention, examples of which are illustrated in the accompanyingdrawings.

FIG. 7 is an enlarged plan view of an array substrate for an LCD deviceaccording to the present invention. FIGS. 8A and 8B are enlarged planand perspective views of a portion “J” of the FIG. 7. As shown in FIG. 7and FIGS. 8A and 8B, gate and data lines 125 and 144, a TFT T, a pixelelectrode 150, a storage capacitor Cst, a black matrix 102 and analignment key AK are formed on the first substrate 100. The black matrix102 blocks light and is formed corresponding to a non-display regionincluding the gate and data lines 125 and 144, the TFT T and the storagecapacitor Cst on the first substrate 100. Simultaneously, the alignmentkey AK is formed at periphery of the first substrate 100. The alignmentkey AK is used for aligning a photoresist pattern and a gate electrode.The photoresist pattern and the gate electrode are formed at an accuratelocation using the alignment key AK. The gate and data lines 125 and 144are formed on the black matrix 102 and cross each other to define apixel region P. The TFT T, which may be made of polycrystalline silicon,includes a gate electrode 122 and a semiconductor layer ofpolycrystalline silicon. The TFT T is formed at a crossing portion ofthe gate and data lines 125 and 144. The storage capacitor Cst is formedat a region adjacent to the TFT T. The TFT T is used to apply a voltageto the pixel electrode 150 on the pixel region P.

When the gate electrode 122 is formed on the semiconductor layer 110, aprotrusion G is formed at a crossing portion of the gate electrode 122and the semiconductor layer 110. The protrusion G is formed in an areawhere a step difference results in the semiconductor layer 110. Theprotrusion G prevents the gate electrode 122 from being disconnected asa result of over etching performed at the portion of the stepdifference.

FIGS. 9A and 9B are schematic cross-sectional views of an LCD devicehaving an integrated DC according to the present invention. FIG. 9Ashows a CMOS structure, and FIG. 9B is a view taken along the line IX-IXof FIG. 7. As shown in FIGS. 9A and 9B, a liquid crystal panel LP of theLCD device having an integrated driving circuit according to the presentinvention includes a first substrate 100 and a second substrate 300. Acommon electrode 304 and a color filter 302 including red, green andblue sub-color filters corresponding to the pixel region P are formed onthe second substrate 300. The common electrode 304 corresponding to thepixel electrode 150 is formed on an entire surface of the secondsubstrate 300.

As mentioned above, the first substrate 100 includes a display region D1and a non-display region D2. A driving circuit (DC) is formed in thenon-display region D2(DC). The DC has a CMOS structure including ann-type TFT T(n) and a p-type TFT T(p). In the display region D1, theTFT, the storage capacitor Cst and the pixel electrode 150 are formed.The TFT T may be made of polycrystalline silicon and is used as aswitching element. The gate line 125 is formed along a direction of thepixel region P, and the data line 144 is formed along another directionof the pixel region P.

Unlike the related art, the LCD device according to the presentinvention includes the black matrix 102 on the first substrate 100.Accordingly, the black matrix 102 on the first substrate 100 does notrequire the margin α, and thus, the LCD device according to the presentinvention has a high aperture ratio.

FIGS. 10A to 10J and FIGS. 11A to 11J are cross-sectional views showinga process of fabricating an array substrate for an LCD device having anintegrated DC according to the present invention. FIGS. 10A to 10J showa process of fabricating a driving circuit, and FIGS. 11A to 11J show aprocess of a pixel region.

FIGS. 10A and 11A show a first mask process. As shown in FIGS. 10A and11A, the display region D1 and the non-display region D2 having a firstregion A1 and a second region A2 are defined on the first substrate 100.The pixel region P having a switching region A3 and a storage region A4and A4(Cst) is defined in the display region D1. The black matrix 102 isformed on the first substrate 100 by depositing and patterning a metalusing a first patterning mask. The black matrix 102 covers thenon-display region D2, the switching region A3, the storage region A4,and a region surrounding the pixel region P. Simultaneously, thealignment key AK is formed on the first substrate 100.

FIGS. 10B and 11B show a second mask process. As shown in FIGS. 10B and11B, a buffer layer 104 is formed on an entire surface of the firstsubstrate 100 including the black matrix 102 and the alignment key AK bydepositing an insulating material. Next, an amorphous silicon layer maybe formed on the buffer layer 104 by depositing amorphous silicon, andthen a process of crystallizing the amorphous silicon layer into apolycrystalline silicon layer is performed. The crystallization of theamorphous may be performed using laser. Then, first, second, third andfourth semiconductor layers 106, 108, 110 and 112 are formed on thebuffer layer 104 by patterning using a second patterning mask. Thefirst, second and third semiconductor layers 106, 108 and 110 in thefirst region A1, the second region A2 and the switching region A3,respectively, are an active layer, and the fourth semiconductor layer112 in the storage region A4 is an electrode.

FIGS. 10C and 11C show a third mask process. As shown in FIGS. 10C and11C, a photoresist is coated on the entire surface of the firstsubstrate 100 including the first, second, third and fourthsemiconductor layers 106, 108, 110 and 112. A photoresist pattern 114 isformed on the semiconductor layers 106, 108, 110 and 112 by patterningthe photoresist using a third patterning mask. The photoresist pattern114 covers the first semiconductor layer 106 and parts of the second andthird semiconductor layers 108 and 110. The second semiconductor layer108 in the second region A2 and the third semiconductor layer 110 in theswitching region A3 are divided into three regions, respectively, andthe three regions are defined as an active region B1, a lightly dopeddrain (LDD) region B3 and an ohmic contact region B2. The active regionB1 corresponds to a center portion of the second and third semiconductorlayers 108 and 110, and the LDD region B3 is disposed at the both sidesof the active region B1. The ohmic contact region B2 is disposed atouter sides of the LDD region B2. A purpose in forming the photoresistpattern 114 is to cover the active and LDD region B1 and B3.

Next, n+ type impurities are doped on the entire surface of the firstsubstrate 100 including The photoresist pattern 114. The n+ typeimpurities are doped into the ohmic contact region B2 in the secondregion A2 and the switching region A3. Accordingly, the fourthsemiconductor layer 112 in the storage region A4 is redefined as a firststorage electrode 112. Then, the photoresist pattern 114 is removed fromthe first substrate 100.

FIGS. 10D and 11D show a fourth mask process. As shown in FIGS. 10D and11D, a gate insulating layer 116 is formed on the entire surface of thefirst substrate 100 by depositing an inorganic insulating material suchas silicon nitride or silicon oxide. The gate insulating layer 116 isformed on the first substrate 100, the semiconductor layers 106, 108 and110 and the first storage electrode 112. This enables the gateinsulating layer 116 to have a step difference corresponding to a heightof the semiconductor layers 106, 108 and 110 and the first storageelectrode 112. Sequentially, first, second and third gate electrodes118, 120 and 122 and a second storage electrode 124 are formed on thegate insulating layer 116 by depositing and patterning a conductivemetal using a fourth patterning mask. The first, second and third gateelectrodes 118, 120 and 122 are formed corresponding to the center ofthe first, second and third semiconductor layer 106, 108 and 110. Thesecond storage electrode 124 is formed corresponding to the firststorage electrode 112. The second and third gate electrodes are formedcorresponding to the active region B1 of the first and thirdsemiconductor layers 108 and 110. The first, second and third gateelectrodes 118, 120 and 122 have a smaller size than the first, secondand third semiconductor layer 106, 108 and 110, and the second storageelectrode 124 has substantially the same size as the first storageelectrode 112. Simultaneously, the gate line 125 is formed along adirection of the pixel region P. Also, when the gate electrodes 118, 120and 122 and the second storage electrode 124 are formed on the gateinsulating layer 116, the protrusion G is formed at a crossing portionof the first, second and third gate electrodes 118, 120 and 122 and thefirst, second and third semiconductor layer 106, 108 and 110. Theprotrusion may have a triangle shape. The protrusion prevents theetchant, which is used for forming the gate electrodes 118, 120 and 122,from pooling at the crossing portion having the step difference.Accordingly, the gate electrodes 118, 120 and 122 do not becomedisconnected due to overetching. Thus, a problem of the related art isresolved.

FIGS. 10E and 11E show a fifth mask process. As shown in FIGS. 10E and11E, a photoresist pattern 126 is formed on the gate electrodes 118, 120and 122 and the gate insulating layer 116 by coating and patterning thephotoresist. To pattern the photoresist, a fifth pattering mask is used.The photoresist pattern 126 covers the second, switching and storageregions A2, A3 and A4 and exposes the first region A1. Then, a p+ typeimpurities are doped into the first region A1 using the first gateelectrode 118 as a doping mask such that both ends of the firstsemiconductor layer 106 have ohmic contact characteristics. Both ends ofthe first semiconductor layer 106 are defined as ohmic contact regionsB2. The active region B is defined in a region between ohmic contactregions B2. The photoresist pattern 126 is removed from the firstsubstrate 100.

FIGS. 10F and 11F show a process of forming a LDD region on second andthird semiconductor layers 106 and 108. After the photoresist pattern126 is removed, n− type impurities may be doped into the entire surfaceof the first substrate 100. The n-type impurities are doped into the LDDregion B3 of the second and switching regions A2 and A3 using the secondand third gate electrodes 120 and 122 as doping masks, such that the LDDregion B3 is formed in the second and switching regions A2 and A3. TheLDD region minimizes leakage current of the TFT. The n− type impuritiesare doped into the ohmic contact region B2 of the first, second thirdsemiconductor layers 104, 106 and 108. However, since n+ or p+ typeimpurities of a greater amount than the n− type impurities have beendoped into the ohmic contact regions B2 of the first, second thirdsemiconductor layers 104, 106 and 108, n− type impurities do not affecttheir characteristics.

FIGS. 10G and 11G show a sixth mask process. As shown in FIGS. 10G and11G, a interlayer insulating layer 130 is formed on the first substrate100 by depositing and pattering an inorganic insulating material, suchas silicon nitride and silicon oxide. The interlayer insulating layer130 is patterned using a sixth patterning mask (not shown) to form firstcontact holes 132 a, 134 a and 136 a and second contact holes 132 b, 134b and 136 b. The first contact holes 132 a, 134 a and 136 a and secondcontact holes 132 b, 134 b and 136 b are formed through the interlayerinsulating layer 130 and the gate insulating layer 116 in the first,second and switching regions A1, A2 and A3. The first contact holes 132a, 134 a and 136 a and the second contact holes 132 b, 134 b and 136 bexpose ohmic contact regions B2 of the first, second and thirdsemiconductor layers 104, 106 and 108, respectively.

FIGS. 10H and 11H show a seventh mask process. As shown in FIGS. 10H and11H, source electrodes 138 a, 140 a and 142 a and drain electrodes 138b, 140 b and 142 b are formed on the first substrate 100 by depositingand pattering a conductive metal using a seventh patterning mask. Theconductive metal may include chrome, molybdenum, tungsten, copper,aluminum alloy, etc. The source electrodes 138 a, 140 a and 142 a andthe drain electrodes 138 b, 140 b and 142 b contact the ohmic contactregions B2 through the first contact holes 132 a, 134 a and 136 a andthe second contact holes 132 b, 134 b and 136 b, respectively.Simultaneously, the data line 144 is formed along another direction ofthe pixel region P.

Through the above-mentioned process, the CMOS structure including thep-type and n-type TFTs made of polycrystalline silicon is formed in thenon-display region. Also, the n-type TFT made of polycrystalline isformed in the switching region, and the storage capacitor including thefirst and second storage electrode is formed in the storage region.

FIGS. 10I and 11I show an eighth mask process. As shown in FIGS. 10I and11I, a passivation layer 146 is formed on the entire surface of thefirst substrate 100 by depositing an insulating material. Then, a draincontact hole 148 is formed through the passivation layer 146 bypatterning the passivation layer 146 using an eighth patterning mask.The drain contact hole 148 exposes the drain electrode 142 b in theswitching region A3.

FIGS. 10J and 11J show a ninth mask process. As shown in FIGS. 10J and11J, the pixel electrode 150 is formed on the passivation layer 146 inthe pixel region P by depositing and pattering a transparent conductivemetal using a ninth patterning mask. The transparent conductive metalmay include indium-tin-oxide (ITO) or indium-zinc-oxide (IZO). The pixelelectrode 150 contacts the drain electrode 142 b through the draincontact hole 148.

Through the above-mentioned process, the array substrate for the LCDdevice according to the present invention has been manufactured. Becausethe doping processes of forming the n-type TFT made of polycrystallinesilicon and the electrode of the storage capacitor are performed at thesame time, the number of processes in fabrication of the array substratedecreases.

The LCD device is formed using the array substrate according to thepresent invention and the color filter substrate. The color filtersubstrate includes a color filter layer including red, green and bluesub-color filters and a common electrode. Unlike the color filtersubstrate according to the related art, the color filter substrateaccording to the present invention does not include the black matrix.The LCD device is manufactured by attaching the array substrate and thecolor filter substrate and forming a liquid crystal layer therebetween.

It will be apparent to those skilled in the art that variousmodifications and variations can be made in the present inventionwithout departing from the spirit or scope of the invention. Thus, it isintended that the present invention cover the modifications andvariations of this invention provided they come within the scope of theappended claims and their equivalents.

1. An array substrate for a liquid crystal display (LCD) device,comprising: a substrate including a display region and a non-displayregion at a periphery of the display region; a first thin filmtransistor (TFT) in the non-display region, the first TFT including afirst semiconductor layer, a first gate electrode over the firstsemiconductor layer, a first source electrode and a first drainelectrode, wherein the first gate electrode is directly over the firstsemiconductor layer; a first protrusion extending from the first gateelectrode along an edge of the first semiconductor layer; a second TFTin the non-display region, the second TFT including a secondsemiconductor layer, a second gate electrode over the secondsemiconductor layer, a second source electrode and a second drainelectrode, wherein the second gate electrode is directly over the secondsemiconductor layer; a second protrusion extending from the second gateelectrode along an edge of the second semiconductor layer; a gate lineand a data line crossing each other in the display region to define apixel region; a third TFT connected to the data line and the gate linein the display region, the third TFT including a third semiconductorlayer, a third gate electrode over the third semiconductor layer, athird source electrode and a third drain electrode, wherein the thirdgate electrode is directly over the third semiconductor layer; a thirdprotrusion extending from the third gate electrode along an edge of thethird semiconductor layer; and a pixel electrode connected to the thirddrain electrode in the pixel region, wherein at least one of the first,second and third gate electrodes has first and second sides opposite toeach other, and a corresponding protrusion of the first, second andthird protrusions to the at least one of the first, second and thirdgate electrodes is disposed at both of the first and second sides. 2.The array substrate according to claim 1, wherein the first, second andthird protrusions have one of a triangle shape, a rectangular shape anda circular shape.
 3. The array substrate according to claim 1, whereinthe second and third semiconductor layers include an active region, alight doped drain (LDD) region and an ohmic contact region, the LDDregion being disposed at both sides of the active region and the ohmiccontact region being disposed at outer sides of the LDD region.
 4. Thearray substrate according to claim 3, wherein the ohmic contact regionis doped with high concentration impurities and the LDD region is dopedwith low concentration impurities.
 5. The array substrate according toclaim 1, wherein the first semiconductor layer includes an active regionand an ohmic contact region at both sides of the active region.
 6. Thearray substrate according to claim 5, wherein the ohmic contact regionis doped with one of p-type impurities and n-type impurities.
 7. Thearray substrate according to claim 1, wherein the first, second andthird semiconductor layers are made of polycrystalline silicon.
 8. Thearray substrate according to claim 1, further comprising a storagecapacitor including a fourth semiconductor layer and a fourth gateelectrode over the fourth semiconductor layer in the display region. 9.The array substrate according to claim 8, wherein the fourthsemiconductor layer is doped with one of p-type impurities and n-typeimpurities.
 10. The array substrate according to claim 1, furthercomprising a black matrix corresponding to the non-display region, thethird TFT, the gate line and the data line on the substrate.
 11. An LCDdevice, comprising: a first substrate having a display region and anon-display region at periphery of the display region; a first TFT inthe non-display region, the first TFT including a first semiconductorlayer, a first gate electrode over the first semiconductor layer, afirst source electrode and a first drain electrode, wherein the firstgate electrode is directly over the first semiconductor layer; a firstprotrusion extending from the first gate electrode along an edge of thefirst semiconductor layer; a second TFT in the non-display region, thesecond TFT including a second semiconductor layer, a second gateelectrode over the second semiconductor layer, a second source electrodeand a second drain electrode, wherein the second gate electrode isdirectly over the second semiconductor layer; a second protrusionextending from the second gate electrode along an edge of the secondsemiconductor layer; a gate line and a data line crossing each other inthe display region to define a pixel region; a third TFT connected tothe data and gate lines in the display region, the third TFT including athird semiconductor layer, a third gate electrode over the thirdsemiconductor layer, a third source electrode and a third drainelectrode, wherein the third gate electrode is directly over the thirdsemiconductor layer; a third protrusion extending from the third gateelectrodes along an edge of the third semiconductor layers; a pixelelectrode connected to the third drain electrode in the pixel region; asecond substrate facing the first substrate; a color filter on thesecond substrate; a common electrode on the color filter; and a liquidcrystal layer interposed between the pixel electrode and the commonelectrode, wherein at least one of the first, second and third gateelectrodes has first and second sides opposite to each other, and acorresponding protrusion of the first, second and third protrusions tothe at least one of the first, second and third gate electrodes isdisposed at both of the first and second sides.